Advancements in the Semiconductor Industry: A Journey from Transistors to AI Manufacturing
ABSTRACT
The semiconductor industry has evolved significantly since the invention of the transistor over 75 years ago. Today, advanced chip technology and artificial intelligence (AI) power manufacturing equipment to produce the next generation of computer chips. This AI technology is supported by the machine's sensing capability. The ability to monitor wafer location, vibration and positioning are just some of the areas where the technology is enabled by the evolution of sensing technologies that include micro electro-mechanical systems (MEMS) and image sensors.
This presentation will examine the shift towards smarter semiconductor production tools, the challenges of improving these technologies, the role of digital twins in boosting productivity and maintenance, and how – as the MEMS industry considers a move from 200 mm and 300 mm – they too will be able to benefit from these learnings while being an enabling technology.
BIOGRAPHY
Michelle Bourke received her B.Sc. degree in Optoelectronics and Laser Engineering from Heriot-Watt University in Scotland, UK. Subsequently she joined the Defence Evaluation and Research Agency (DERA), where she worked on advanced processing methods for GaAs/AlGaAs optoelectronic devices. In 1997 she entered the semiconductor capital equipment industry as a technologist and has since accrued more than 25 years of experience in semiconductor technology, strategy, and new product development. She is a specialist in fabrication technologies for MEMS, Power Devices, RF Electronics and Optoelectronics.
Michelle is a frequent presenter at leading industry forums and also serves on many committees and industry councils. In November of 2018, she was inducted into the Semi MEMS and Sensors Industry Group Hall of Fame and in 2020 she was a Silicon Valley YWCA Tribute to Women Honoree. Michelle is currently Chair of the Semi MEMS Manufacturing Working Group, Co-chair of the Semi MEMs Standards Committee and a Director on the Transducers Research Foundation Board where she is the Chair of Fund Raising and Development Committee. Michelle joined Lam Research in 2015 and is currently Managing Director of Strategic Marketing in Lam’s Customer Support Business Group.