Matching Applications to Technology Nodes:From MEMS on Panel to Nanophotonics Readout for 300mm MEMS
ABSTRACT
In this presentation, Xavier Rottenberg will cover imec’s development of a panel-based manufacturing platform allowing unprecedented sensor form factors and price points. Additionally, he will describe the hybridization of the mature 300mm integrated photonics platform for MEMS read-out, enabling unprecedented sensitivity and miniaturization.
BIOGRAPHY
Dr. Xavier Rottenberg leads wave-based Sensing and Actuation developments at imec, working on integrated photonics, flat optics, acoustics, photo-acoustics and M/NEMS. He obtained his MSc degree in Physics Engineering and the DEA in Theoretical Physics from the Université Libre de Bruxelles in 1998 and 1999. He obtained in 2008 his PhD degree in Electrical Engineering from the KU Leuven. He worked one year at the Royal Meteorological Institute of Belgium in the field of remote sensing from Space. He has been at imec since 2000, where he contributes to research in the field of RF, RF-MEMS, photonics and microsystems modelling/integration. He has (co-)authored over 150 peer reviewed publications, has been granted various patents and co-founded Pulsify Medical in 2019, a company developing ultrasound imaging patches.