Bio
Martin Wirz is a Sales Director at Sensirion, a Swiss-based MEMS sensor manufacturer. Martin has 8+ years of experience in the semiconductor industry and an in-depth sensor market understanding. He received his MSc and Ph.D. in Electrical Engineering from the Federal Institute of Technology ETH Zürich and holds a Master in Finance from the University of Zürich.
Abstract
Sensors are the ears and eyes of any manufacturing process. In this tutorial, I show the value of sensors to optimize semiconductor manufacturing processes. I will walk the audience through three examples where liquid flow and gas flow sensors are being used and how they can help optimize processes. I focus on monitoring the dispensing on photoresist during the spin coating process; precise automation of pick-and-place machines and detect wrongful user handlings with liquids.
I will highlight the benefits of sensors to improve precision of an automated process, to optimize yield and to avoid downtimes of manufacturing equipment. In the final part, I will discuss general trends and how sensor innovation meets industry needs.