Tom Hoogenboom started his career at Philips in e-beam lithography in the 1980's, working on system aspects and machine software definition. After a sidestep into Philips Medical Systems (Magnetic Resonance Imaging Software) he joined ASML in 1998 as a system engineer, where he recently moved to the position of enterprise architect. Specializing in Software Technology, Tom guided developments related to the machine control of the PAS and TwinScan lithography machines and the development of the second generation YieldStar metrology tools. Today Tom's focus is on the SW infrastructure needed to control nm feature placement at the sub-nm level. Tom's special interests are the social aspects of software engineering and specifically SW as enabler for cross-enterprise team collaboration.