MSIG Webinar

Abstract

The successful development of MEMS (Micro-Electro-Mechanical Systems) products requires a structured approach that balances innovation with manufacturability, cost, and time to market. The MEMS Manufacturing Readiness Levels (MMRL) Guide provides a comprehensive framework to navigate this process, from initial concept through high-volume production.

In this webinar, we will explore how MMRL facilitates efficient MEMS development by defining commonly accepted readiness levels, best practices, and key decision points. Attendees will gain insights into:

• The MMRL framework and its role in MEMS product development
• Best practices for reducing risks and accelerating time to market
• Strategies for ensuring performance, quality, and cost targets are met
• Real-world applications and lessons learned from implementing MMRL

Join us to learn how MMRL can streamline your MEMS development process, improve collaboration, and drive successful product commercialization.

Speakers

Michelle Bourke | Managing Director of Strategic Marketing and Specialty Technologies, Lam Research

Michelle Bourke received her B.Sc. degree in Optoelectronics and Laser Engineering from Heriot-Watt University in Scotland, UK. Subsequently she joined the Defence Evaluation and Research Agency (DERA), where she worked on advanced processing methods for GaAs/AlGaAs optoelectronic devices. In 1997 she entered the semiconductor capital equipment industry as a technologist and has since accrued more than 25 years of experience in semiconductor technology, strategy, and new product development. She is a specialist in fabrication technologies for MEMS, Power Devices, RF Electronics and Optoelectronics.

Michelle is a frequent presenter at leading industry forums and also serves on many committees and industry councils. In November of 2018, she was inducted into the SEMI MEMS and Sensors Industry Group Hall of Fame and in 2020 she was a Silicon Valley YWCA Tribute to Women Honoree. Michelle is currently Chair of the Semi MEMS Manufacturing Working Group, Co-chair of the SEMI MEMs Standards Committee and a Director on the Transducers Research Foundation Board where she is the Chair of Fund Raising and Development Committee.

Michelle joined Lam Research in 2015 and is currently Managing Director of Strategic Marketing in Lam’s Customer Support Business Group.

Mary Ann Maher | CEO, SoftMEMS LLC

Mary Ann Maher is the CEO of SoftMEMS LLC. She received her Ph.D. degree in 1989 from Caltech in the area of semiconductor device modeling. She has held positions at the Swiss Center for Electronics and Microtechnology (CSEM), Tanner Research and MEMSCAP Inc. She founded SoftMEMS LLC in 2004. She has over 30 years of experience in the field of computer aided design for MEMS.

Rob Pugliese | Principal Engineer, HP Inc.

Rob Pugliese is a Principal Engineer at HP Inc. in Corvallis Oregon.  Rob has held several  engineering roles in inkjet printhead development in his 32 years at HP, from etching and deposition engineer to yield improvement, printhead architecture design and life science fluid dispensing, as well as a rotation in engineering management. He is currently working in the MEMS section of the Microfluidics Technology Incubation lab, where he guides development of new microfluidic devices, curates the technology development process, and leads the tooling/capability strategy for the MEMS fab. Rob has a Ph.D. in Chemical Engineering from the University of Massachusetts at Amherst.

Tyler Harrison | Design Engineer, Teledyne MEMS

Dr. Tyler Harrison is the lead Design Engineer at Teledyne MEMS in Edmonton, Canada. His undergraduate background in Computer Engineering led to a PhD program focused on ultrasound and photoacoustic systems design and integration, all at the University of Alberta. After graduating, a postdoctoral position shared between the University of Alberta and Micralyne Inc (now Teledyne MEMS) led to full time MEMS development work in 2016. Since then, he’s filled a variety of Engineering roles helping develop new processes and translate customer concepts to fabricated devices. In his tenure at Teledyne MEMS, he’s led several initiatives to automate and error-proof layout processes, standardize process control monitoring, and use data-driven approaches to improve first-run performance on new devices.

Tim Maloney | Senior Director of Business Development, Polar Semiconductor 

Tim Maloney is the Senior Director of Business Development at Polar Semiconductor in Bloomington, Minnesota. With over 25 years of experience in the semiconductor industry, Tim has led initiatives across process engineering, factory operations, technology transfers, and supply chain management. In his current role, he is instrumental in Polar Semiconductor’s transformation into a U.S.-based open foundry specializing in power and sensor devices. His career includes leadership roles at Motorola Semiconductor, onsemi, Seagate Technology, SkyWater Technology, and Polar Semiconductor. Tim holds a background in Industrial Engineering from the University of Wisconsin-Madison and Arizona State University.