Enabling High Efficiency Sensing with Optomechanical Devices
Abstract
Light-based motion detection for extreme sensitivity, ultra-rapid response, and superior integrability.
CEA-Leti’s optomechanical sensor technology represents the next evolution of microelectromechanical (MEMS) sensors. From the capacitive sensors of the 1980s to the more recent piezoresistive sensors, MEMS have become increasingly sensitive over the past several decades. Today, CEA-Leti is bringing silicon photonics to high-performance MEMS for a new generation of optomechanical sensors.
Optomechanical sensing—sensing through light—is a new paradigm. And silicon-based optomechanical devices represent a giant leap in performance, combining extreme sensitivity (femtometer detection), ultra-rapid response in the terahertz range and superior integrability using proven 200 nm VLSI MEMS and photonic integrated circuit technologies.
We have been developing this platform for several years and have successfully matured the technology itself to TRL levels 3 to 4. As part of our R&D Lab to Fab model, we are building partnerships to move towards product development in view of different use cases.
CEA-Leti’s optomechanical sensing platform is ideal for:
- Portable in-situ mass spectrometry with extreme sensitivity down to individual viruses and proteins for biological analysis and environmental monitoring.
- Biological sensing offering rapid biomarker detection and sensitivity down to single bacteria for diagnostics and water testing.
- Real-time atomic-force microscopy imaging approaching video-rate imaging for the observation of fast biological processes.
It also supports silicon clocks with quartz-like accuracy for:
- Native GHz-frequency clocks with no electronic multiplication for the ultimate in precision.
The technology also brings new levels of precision and compactness to inertial sensors and is being investigated for quantum information transfer
Biography
CEA LETI is a leading MEMS R&D lab working for industry, with more than 150 people working on these topics – world’s largest MEMS R&D institute. Pierre-Damien was previously the MinaSmart (European Digital Innovation Hub) director at Minalogic. He worked before as CPS European projects manager, Head of Smart Devices Program, Industrial Partnership Manager and VP Business Development & Communication at CEA-Leti.
With more than 25 years of experience, 10 years in industry, 15 years in R&D serving industry, his experience has allowed him to master the right balance between business and innovation - Understand and listen to needs, identify and select innovative solutions, enhance the functions that meet expectations, communicate to radiate.