MEMS Reimagined: Photonic Readout and On-Chip Compute
Abstract
The time is ripe for a fundamental shift in MEMS architecture; one where readout noise, sensitivity, mechanical design freedom, and signal processing are defined by light. In this talk, I introduce our photonic-MEMS platform, which embeds suspended MEMS structures into the evanescent field of photonic integrated-circuit (PIC) ring resonators to achieve accelerometer and gyroscope performance beyond capacitive MEMS at equivalent SWaP-C. We have evolved a single-wafer fabrication flow, leveraging low-loss waveguides, MEMS device layers that allow for in-plane and out-of-plane sensing, and integrated chip-scale lasers and detectors. Our sensors extend uninterrupted autonomy of logistics and warehouse robots where GNSS is unavailable, and resilience in high-vibrational platforms such as drones. I will outline key milestones, discuss challenges, and present a future roadmap for photonic sensor systems unifying sensing, signal processing, and on-chip computation via light.
Biography
Dr. Ying Lia Li (Lia) is the visionary CEO and Founder of Zero Point Motion, pioneering the development of chip-scale optical inertial sensors set to revolutionize navigation and positioning. With a PhD in cavity optomechanics from UCL, Lia also brings a wealth of experience from her work in laser development at Imperial College and sensor innovation at BAE Systems, consistently pushing the boundaries of precision sensing. She holds four granted patents, with three more pending.