With the world's growing reliance on semiconductor chips, the industry needs a more reliable solution to improve and innovate at a rapid pace while addressing manufacturing challenges such as temperature, chemistry, and mechanical issues.
One critical equipment in the industry is vacuum Pendulum Valves, a vacuum equipment incorporating plasma that are widely used in the semiconductor manufacturing process. The form, fit and function of these valves pose multiple challenges for the seals required in the valve's assemblies. Greene Tweed engineers have analyzed the most commonly used pendulum valves and broken down the various sealing challenges and have also created solutions to the challenges.
Watch the recording to learn about the 6 W's—Who, What, When, Where, Why, & How—of these pendulum valve solutions.
- Who—Anyone running a vacuum plasma chamber, etch and/or deposition
- What—The pendulum valves, specifically the seals in the valve
- Where—Every fabricator in the world
- When—Now, as there are, tens of thousands that are currently operating
- Why—The prevalent sealing challenges for pendulum valves
- How—The sealing solutions and how we develop them, and the case study behind it to show in the 'How' part as well
Greene Tweed engineers will discuss the most commonly used pendulum valves, the various sealing challenges and solutions to address them.