June 26, 2019
A SEMI Electronic Materials Group (EMG) Hosted Webinar
Time
10:00 am - 11:00 am PDT
Location
United States
Despite earlier thoughts that semiconductor wet processing would be supplanted by dry, the quantity and variety of wet chemicals used in semiconductor manufacturing increases with each new technology generation. Chemical quality and purity requirements are also increasing in tandem with usage, creating new and novel challenges to manufacture, analyze, and use these chemicals. This webinar will provide insights on this issue from the perspective of both the fab and a supplier of chemistries and contamination control solutions. Dr. Thomas Phely-Bobin, Director, Global Applications Development at Entegris, will discuss the control of various impurities in liquids used in semiconductor manufacturing. Following Dr. Bobin will be Dr. Dhiman Bhattacharyya, Technical Staff at GLOBALFOUNDRIES speaking about "Impurities Impact on Performance and High Volume Manufacturing."
This topic will also be among those addressed in a Risk Reduction TechTALK to be held at SEMICON West in July, so be sure to attend both to hear experts addressing a wide range of issues vital to the future of advanced semiconductor manufacturing.
Agenda
Introduction
Speaker Biography
Dr. Thomas Phely-Bobin is currently the Director of Applications and Metrology for the Microcontamination Control Division at Entegris. Thomas joined Entegris in 2012. Previously, Thomas led the Materials Research group at QinetiQ North America from 2004 to 2012. From 2002-2004, Thomas was a post-doctoral fellow at Sandia National Laboratories, US Department of Energy (Albuquerque, NM). Thomas earned an M.S. and PhD in Polymer Science and Engineering at the Institute of Materials Science at the University of Connecticut in 2001. Thomas is the author of more than 30 papers in technical journals or conferences, and 2 issued patents.
Speaker Biography
Dr. Dhiman Bhattacharyya is currently a member of technical staff at GLOBALFOUNDRIES. He has been working on process engineering in wet cleans for more than six years and also actively involved in analysis and quality improvements in bulk chemicals associated to wet cleans. Dhiman has published 10 papers at various technical conferences including ASMC, SPCC, CMC and UCPSS while representing GLOBALFOUNDRIES since 2013. Previously, Dhiman carried out his research works at Massachusetts Institute of Technology after completion of his Ph.D. He is a Ph.D. in chemistry from the University of Texas at Arlington with focus on surface modification by chemically vapor deposited polymer thin films. He has bachelor and master degrees in Polymer Science & Technology from Calcutta University, India. He has more than 30 publications in top peer-reviewed journals and technical conferences and 8 US patent applications with 4 being issued prior to joining GLOBALFOUNDRIES.
Q&A
Wrap-up
