Concept & Vision of Future Wafer Fab Equipment
ABSTRACT
The semiconductor market is expected to double towards 2030. To achieve this, countries and governments are supporting the development and manufacturing environment. Moore's Law continues to drive the semiconductor industry, and its technical requirements are diversifying and diversifying. In my keynote speech, I will introduce the future vision of the equipment that TEL is aiming for.
BIOGRAPHY
After working as process engineer at a semiconductor device manufacturer, he changed jobs to Tokyo Electron (TEL) in '98. Engaged in semiconductor manufacturing equipment development and process development at TEL. After that, as a development and marketing member, he led product planning such as etching equipment and deposition equipment, as well as the development of modules that spanned multiple of the company's products. Currently, he is in charge of C&F (Concept & Feasibility) and core technology development, promoting innovation through next-generation equipment development and collaboration with various research institutes and partner companies.