Innovations in Electronic Specialty Gas Systems
ABSTRACT
This presentation will focus on the importance of collaborative innovations in the industry. Innovation drives our industry; it’s not a luxury but a necessity in today’s market. Pathways for innovation in gas systems begins with us all and requires us all. Three specific examples involving our work at Micron will be presented. The three examples will be source gas purification which delves into a critical corrosion issue faced with HCl and the mitigating steps taken, collaborative design with equipment suppliers on stacked VMBs to aid in relieving space constraints in subfabs, and the use of impedance process line heating to aid in providing consistent temperature line heating to temperature critical fluids.
BIOGRAPHY
Saurav Bhattacharjee started his professional career in 2021 as a Facilities Operations Engineer at Micron Memory Taiwan, followed by a stint as a senior dry etch engineer. In his current role, Saurav serves as a technical design lead for high purity gas systems, enabling Micron’s aggressive frontend expansion in the United States. Saurav was voted as one of the 25 Micron Employees of the Year in 2023.
Saurav holds a PH.D. and a master’s degree in chemical engineering from National Tsing Hua University, Taiwan, while he earned his undergraduate degree in Chemical Engineering from Manipal University, India. In his free time, Saurav likes to indulge in philately, Formula 1, cricket and wildlife research.