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Metrology for 3D Devices

 

ABSTRACT 

The future of semiconductor metrology is driven by smaller and more complex 3D devices. As device features approach atomic scales, advanced metrology techniques are required to ensure the quality & performance of chips

 

BIOGRAPHY 

Raghu Nayak, Zeiss

Raghu Nayak is currently a Director of Business Development & New Product Introduction at Carl ZEISS SMT. He has over 20 years’ experience in the semiconductor industry, focused on product development, business development and monetization of solutions for semiconductor process control. He has been especially successful in establishing several market-shaping metrology and inspection products for leading edge Logic and Memory manufacturing. He specializes in delivering cross-platform solutions from light, laser, e-beam, ion-beam and x-ray optics for the full-spectrum of process control applications.

Raghu is recipient of several leadership and business success awards for his contribution to the productization, delivery and adoption of novel metrology solutions. He is also the recipient of the prestigious Department for International Development Scholarship from the United Kingdom government for his graduate studies in Mechatronics.