New Development in Analytical Metrology Technology for Semiconductor Processes
ABSTRACT
As analytical boundaries are being pushed to the limits by the semiconductor industry, Thermo Fisher Scientific is constantly developing new instrument innovations to extend these boundaries. This talk will identify some of the challenges with current analytical techniques and will present some of the new developments in our technology that will help laboratories overcome these challenges. Especially for specialty gas and high purity chemical manufacturers, detection limits are always a concern. To reach the best possible detection limits, chemicals are typically run with very little dilution, which can present the additional challenge of matrix handling. The newly released iCAP MX ICP-MS instrument has technological advancements to address these challenges. This new technology takes a large step in improving stability, accuracy, and detection limits in ICP-MS, whether working in a clean or heavy matrix. In addition to new ICP-MS technology, we will briefly introduce ways to overcome other analytical challenges with our GC-MS, LC-MS, and IC instrumentation.
BIOGRAPHY
Marshall Allin recently stepped into the role of Technical Sales Specialist for ICP-MS and ICP-OES instruments with Thermo Fisher Scientific, covering the Western US. Before this, he was an Applications Scientist at Thermo, helping customers from a variety of industries with their method development and training on the same instruments. 10 years ago, he joined Thermo Fisher Scientific as a Field Service engineer. Before joining Thermo, he worked as an Analytical Chemist performing method development and validations in a pharmaceutical laboratory on ICP-MS instruments. Now, with a total of 15 years of experience specializing in trace elemental analysis, he has seen these instruments from a wide variety of perspectives. This helps him tailor Thermo Fisher Scientific’s specialized ICP offerings to the unique challenges of any laboratory.