Real-Time Impurity Measurements for Electronic-Grade Oxygen with Modern Analytical Systems
ABSTRACT
Oxygen is an important bulk gas for semiconductor manufacturing. As such, purity is paramount, with requirements becoming more stringent with every introduction of new node sizes and processing steps. Current guidance by IRDS specifies limits for critical impurities in bulk gases (incl. oxygen) as low as 0.1 ppb. With such challenging detection demands, traditional analytical systems are increasingly pushed to their limits. In addition, maintenance and cost of operation are key factors that call for more advanced analytical methods.
Process Insights-Tiger Optics offers two powerful, modern analytical technologies for detecting impurities in electronic-grade gases: Cavity Ring-Down Spectroscopy (CRDS) and Atmospheric Pressure Ionization Mass Spectrometry (APIMS). CRDS can be used in all bulk gases and many specialty gases such as CO2 and hydrides. It offers stable, accurate detection limits well into the parts per trillion (ppt) combined with maximum efficiency and ease of use. CRDS detects trace H2O, CO, CO2 and CH4 in bulk oxygen in line with IRDS requirements without the need for support gases, regular maintenance or periodic calibration.
In addition to the purity of bulk O2, oxygen as an impurity in other gases is equally critical. CRDS detects trace O2 in various gases, incl. bulk gases and CO2. APIMS offers single-digit ppt detection limits for trace O2 and other impurities in a single instrument, including those not detectable with CRDS, e.g. N2, Ar, He, and H2. In the end, CRDS and APIMS can be combined to offer complete, tailor-made CQC solutions for fabs, gas plants and delivery
systems.
BIOGRAPHY
Dr. Florian Adler is a Lead Scientist & Technical Product Manager at Process Insights. He manages the portfolio of Tiger Optics Cavity Ring-Down Spectroscopy instruments for electronic specialty gas applications. Florian has a doctorate in physics from the University of Konstanz, Germany. His technical expertise includes lasers, laser spectroscopy and infrared optics, as well as ultra-high purity gas analysis. In 13 years with the company, he has served in multiple roles in R&D, Marketing and Product Management.