Advancing High Purity Gas Analysis for Semiconductor Manufacturing: Achieving Part-Per-Trillion Detection With APIMS
ABSTRACT
Analytical methods to detect impurities in the parts per trillion region are scare, but demand for ever purer utilities continues, and purification methods develop to address these. In this presentation I will explain how Atmospheric Pressure Ionization Mass Spectrometry (API-MS) can detect impurities to this level and how innovation will drive
an even more sensitive system.
BIOGRAPHY
Daniel Merriman studied Electrical Engineering at Hartford College of Higher Education in the UK. With a career in process analytics spanning 37 years, he has worked extensively in the field of mass spectrometry since joining VG Instruments in 1988, a company now part of Thermo Fisher Scientific. His work has involved extensive product and applications development serving diverse industries including chemical, biotechnology, metals and semiconductor. Since stepping back from his full-time role, today he is an advisor to the Process & Environmental Monitoring business of Thermo Fisher.
Outside of work, Daniel is a passionate football enthusiast and lifelong supporter of Liverpool FC. When not following the team, he enjoys walking in the English countryside or traveling across Europe in an RV with his wife.