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October 28, 2020

Linking Electronic Materials Quality On-Wafer Performance through Metrology
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Time

10:00 am - 11:00 am

Add to Calendar 2020-10-28 10:00:00 2020-10-28 11:00:00 WEBINAR - Connecting the Dots: Linking Electronic Materials Quality to On-Wafer Performance through Metrology Online, PDT, United States SEMI.org contact@semi.org America/Los_Angeles public
Location

Online, PDT,
United States

Linking Electronic Materials Quality On-Wafer Performance through Metrology

As technology nodes advance, critical dimensions shrink, materials proliferate, and architectures become more complex. As a result, semiconductor manufacturing processes become increasingly sensitive to supply chain quality, both the chemicals themselves and how they are characterized. Quality standards have moved from parts-per-million and -billion levels to parts-per-trillion even -quadrillion being required to meet today’s process expectations. With hundreds of variables linking materials properties to device defects, how do we identify critical parameters and establish effective methods to measure and control them? This webinar explores this topic, examining the technology and methods being developed to bridge this gap.

Agenda

10:00 am - 10:05 am
Kevin McLaughlin
Moderator
Kevin McLaughlin, Ph.D
Business Director, Electronic Materials
SACHEM, Inc.

Welcome Remarks

10:25 am - 10:50 am
Yusheng Alvin Zhou KLA
Yusheng (Alvin) Zhou
Product Marketing Manager, Surfscan & ADE
KLA

Speaker Biography

Yusheng (Alvin) Zhou is a Product Marketing Manager in Surfscan & ADE division of KLA. Prior to that, he held various roles in global product management and process engineering for CVD products at Applied Materials. Alvin has a Ph.D. in Materials Science and Engineering and M.S. in Electrical Engineering from Georgia Institute of Technology.

10:05 am - 10:25 am
Cerrium labs_EMG
Tim Z. Hossain & Jim Conner
Cerium Labs

Speaker Biography

Dr. Tim Z Hossain

Tim Z. Hossain received a Ph.D. in Chemistry with specialization in nuclear analytical from University of Kentucky in 1982. He worked at Eastman Kodak (1982-1989), Texas Instruments (1989-1991), and was at Cornell University teaching at Nuclear Engineering program (1991-1995), department of Applied Physics. He joined AMD in 1995, and currently serves as Chief Scientist at Cerium Laboratories, an AMD Spin-off Company. Dr. Hossain has broad experience in analytical methodologies, particularly for semiconductor process technology. He discovered the cosmic ray neutron effect on memory chips with borated dielectric. He was selected by IAEA of United Nations for a nuclear technology mission to Saudi Arabia. He is the former secretary/treasurer of American Nuclear Society. Tim has published over 100 papers and holds more than 30 patents to his credit.

Dr. Jim Conner

Jim Conner holds a PhD in Materials Science and Engineering from Cornell University and a BSc in Physics from the Massachusetts Institute of Technology. He conducted his doctoral work in thin film growth and characterization at Oak Ridge National Laboratory. He has worked at several semiconductor companies, including Motorola Semiconductor Products Sector, Freescale Semiconductor, Samsung, and Cerium Laboratories. Dr. Conner has specialized in high-resolution electron microscopy, including TEM/STEM and SEM imaging and associated analytical techniques including EDS and EFTEM. He has applied these methods to failure analysis of semiconductors and numerous other materials. He is an author or coauthor on over 40 publications in the field.

10:50 am - 10:55 am

Q&A

10:55 am - 11:00 am

Closing Remarks

Registration

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Complimentary for SEMI Members.

$99 Non-Members. 

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