BIOGRAPHY
Rich Wise, PhD leads the patterning technology group in the Lam Research CTO office. Since joining Lam Research in 2014 Dr. Wise has led the introduction of innovative patterning solutions such as dry photoresist supporting the industry migration to EUV and multipatterning innovations for both logic and memory applications.
Prior to joining Lam Research Rich held the appointment of Distinguished Engineer responsible for plasma based patterning solutions in the IBM Semiconductor Research and Development Center in Fishkill, New York. At IBM Rich led plasma based etch process development for the IBM corporation and both advanced memory and logic technology development alliances.
Rich received his PhD in Chemical Engineering from the University of Houston for his research on inductively coupled non-equilibrium plasmas using numerical simulations and optical spectroscopy techniques. Rich holds over 100 patents in the field of plasma based processing and related semiconductor technologies