Expanding the World of MEMS Through Flat Panel Fabs
BIOGRAPHY
Dr. Kimberly Harrison is a lead MEMS developer and fab operations manager at A.M. Fitzgerald & Associates, a Bay Area MEMS design firm. She has over 10 years of experience in process engineering and microdevice development. As part of the design team at A.M. Fitzgerald, she has been involved in all stages of the device life cycle including need-finding, research, design, modeling, simulation, process design and integration, cleanroom processing, foundry transfer, characterization, and testing. Before joining A.M. Fitzgerald, she worked as academic research and independent consultant with universities, start-ups, and large corporations to develop new device designs and fabrication processes in a wide variety of applications, including photovoltaics, resonators, integrated CMOS-MEMS circuits, inertial sensors, and novel semiconductor materials. Dr. Harrison received her B.S. in Mechanical Engineering from MIT, and M.S. and Ph.D. in Mechanical Engineering from Stanford University.