Maskless Aligner in Fabrication of MEMS in Prototyping to High Volume Manufacturing
BIOGRAPHY
Karel Côté obtained a Physics degree at the University of Sherbrooke (1997) and a master’s degree in biophysics/physiology at the University of Sherbrooke (2000). He then joined Mitel Semiconductor Bromont, Qc, Canada plant (that would become Teledyne DALSA) as a phololithography scientist specializing in process/masks integration, 2D/3Dmetrology, and alignment/exposure until 2014. During this time, Teledyne-DALSA went from CMOS/CCD microfabrication to almost uniquely MEMS fabrication using the legacy CMOS tool. He then joined the NRC-Canada as a microfabrication specialist for printable electronics and Biochips for 2 years.
In 2016, Karel finally joined the MiQro Innovation Collaborative Center [C2MI] as a microfabrication specialist where he develops a multitude of specialized MEMS processes and helps with his wide background in the rapid growth of this young “one-of-a-kind” development center.
Karel was also involved in many new equipment purchases, placing the C2MI as a pioneer and a reference. At C2MI, the purchase of a 1X alignment system was his first mandate given and C2MI decided to invest in a new technology that shows great potential instead of going the easy path of the existing market of 1X aligner.