Wafer-Level Integration of 2D Materials for Back-end of Line Applications
ABSTRACT
Layered materials with thicknesses on the atomic scale (2D materials) promise to revolutionize electronics and photonics. Yet, the realization of this potential is hindered by the lack of a viable integration technology that can seamlessly leverage the well-established silicon-based semiconductor manufacturing infrastructure at an industrial scale. Without such a solution, the transformative capabilities of 2D materials may never extend beyond academic research, failing to unlock their full potential in practical applications. In this talk, we showcase advancements in the integration of 2D materials through an innovative waferscale transfer technique developed by the start-up company In2great Materials AB. Our solution is based on adhesive wafer bonding and utilizes equipment, processes, and materials readily available in largescale semiconductor manufacturing lines. Offering compatibility with fully automated tools and independence from recipient wafer topography and surface properties, our approach facilitates the integration of large area 2D materials onto most processed device substrates. These advantages effectively lower the barriers for industry adoption. We demonstrate the wafer-scale transfer of monolayer graphene from copper foils to substrates with diameters of up to 150 mm, ensuring uniform coverage and preserving high material quality.
Furthermore, we fabricated graphene devices on wafer-scale using this transferred 2D material. Expanding our methodology, we achieve the transfer of semiconducting 2D materials, including MoS2, PtSe2, and WS2, onto wafers at a similar scale. With a focus towards MEMS applications, we present suspended membranes composed of supported 2D materials, boosting membrane diameters of up to 150 μm and manufactured in a full-wafer process, highlighting the versatility and scalability of our 2D
material integration approach. These technical results show significant progress towards industrial-scale integration of 2D materials in semiconductor and MEMS manufacturing lines, thereby paving the way for the development of commercially viable 2D material sensors and electronics.
BIOGRAPHY
Arne Quellmalz is the co-founder and chief executive officer (CEO) of the Swedish start-up company In2great Materials AB. In2great Materials enables the development of future electronics by offering the semiconductor industry solutions for integrating atomically thin materials. Arne earned a PhD in Electrical Engineering from the KTH Royal Institute of Technology (Sweden) with a research focus on photonic microsystems and 2D material integration.