Towards a Greener Future: More Sustainable Materials in Semiconductor Manufacturing
ABSTRACT
Sustainability in chip manufacturing is more critical than ever, with greenhouse gas (GHG) emissions and PFAS alternatives at the forefront of our efforts. In this talk, Kevin Gorman, SVP and Head of Patterning Solutions, will showcase innovative strides in tackling these pressing challenges within the semiconductor industry.
In this session, we will review progress in the development of PFAS-free alternatives across various applications, including fluorinated surfactants, EUV rinses to prevent pattern collapse, photoacid generators (PAGs) for chemically amplified photoresists, and top anti-reflective coatings. Additionally, we will present advancements in alternative etch gases that significantly reduce atmospheric lifetime, offering promising replacements for traditional etch gases and contributing to lower GHG emissions in chip manufacturing.
BIOGRAPHY
Kevin Gorman is the Senior Vice President and Head of Patterning Solutions at EMD Electronics, the Electronics business of Merck KGaA, Darmstadt, Germany. In this role, Kevin is responsible for the development, commercialization, and manufacturing of innovative patterning materials for the semiconductor industry.
With over 25 years of experience in engineering, operations, and business management, Kevin has held key positions at Synektron (now TDK), Warn Industries, Cascade Microtech (now FormFactor), and AZ Electronic Materials (now Merck KGaA, Darmstadt, Germany). His expertise spans the semiconductor, life science, and automotive industries.
Kevin has spent the last 13 years as an expatriate, working in South Korea, Germany, India, and Hong Kong. He holds two bachelor’s degrees in Manufacturing Engineering and Industrial Engineering from Oregon State University and an MBA from the FW Olin Graduate School of Business at Babson College.