Micro-electromechanical systems, or MEMS, constitute many devices that combine electrical and mechanical components, range in size from a few microns to millimeters, and are often fabricated using traditional semiconductor manufacturing processes. ALD builds material up Angstroms at a time with high conformality, even on complex geometries.
For MEMS and Sensor fabrication, including inkjet heads, pressure sensors, and microfluidics, ALD offers the most precision deposition technique on the market. Beneq ALD solutions include a wide range of materials and processes, making it simple to coat tiny, complicated components with anti-stiction, piezoelectric, or barrier films.