Equipment Optimization 1
Chairs: Fred Bouchard, Katie Lutker-Lee, Alin Ila
Advanced manufacturing requires a fine balance between maintenance, dispatching and equipment throughput. This session will focus on automated visual inspection and within-tool dispatching and predictive maintenance based on deep learning and stochastic models.
Tuesday, May 3, 2022
1:30 PM ET
4.1 Real-Time Automated Socket Inspection using Advanced Computer Vision and Machine Learning.
Chris Edwards, Aditya Kumar, Alex Vaske, Dipali Pradhan, Nathan McDaniel, Debashis Panda, Intel
1:55
4.2 Artificial Intelligence for Real Time Cluster Tool Scheduling.
Doug Suerich, Trevor McIlroy, PEER Group
2:20
4.3 Stochastics Based Reliability Model for Optimal Scheduled Maintenance of Semiconductor Tools.
Swajeeth Panchangam, Keerthi Gowdaru, Lam Research
2:45
4.4 Real Time Vacuum Leak Detection Technique Calculating Leakage Induced Parameters in Dry Strip.
Jaepyo Jeong, Teakyung Ha, Hyojeong Ji, Sung Jin Yoon, PSK, Inc