Equipment Optimization 2
Chairs: Fred Bouchard, Katie Lutker-Lee, Alin Ila
Advanced manufacturing requires fine optimization of equipment parameters. This session will cover weldment coatings, O-ring surface modifications and modular liquid delivery systems.
Thursday, May 5, 2022
10:00 AM ET
17.1 Specialty Coatings to Reduce Corrosion in Scrubber Components.
Cole Mann, Cesar Garza, Samsung Austin Semiconductor; Nik Snyder, Min Yuan, James Mattzela, SilcoTek Corporation
10:25
17.2 Surface Modification of Elastomeric Seals to Reduce Stiction Force on Various Surfaces.
Feyzan Durn, Murat Gulcur, Maike Khosrawi, Renate Brielmann, Trelleborg Sealing Solutions
10:50
17.3 Evolution of Gas Delivery and Liquid Delivery Systems in Semiconductor Processing Equipment: Modular Architectures Drive Configurability Options and Improve Tool Productivity.
Gary Xing, Paul Werbaneth, Randy Treur, Phil Barros, Ichor Systems