Factory Automation, Industrial Engineering, Smart Manufacturing 2
Chairs: Stefan Radloff, Siva Adusumilli, George Kong, Russ Dover
Implementation of “smart” solutions in semiconductor manufacturing is increasingly needed to help manage the cost and complexity of semiconductor manufacturing. Presentations in this session cover machine learning and other solutions to make manufacturing smarter.
Wednesday, May 4, 2022
2:10 PM ET
12.1 Machine learning Assists on High Aspect Ratio Slit Trench Etching in 3D NAND.
Yu-Fan Chang, Hong-Ji Lee, Fu-Hsing Chou, Shih-Chin Lee, Yao-An Chung, Nan-Tzu Lian, Tzung-Ting Han, Tahone Yang, Kuang-Chao Chen, Chih-Yuan Lu, Macronix International Co., Ltd
2:35
12.2 ILD CMP Polishing Pad and Disk Characterization.
Chong Yew Siew, Liew Siew Wan, Globalfoundries
3:00
12.3 Predictive Maintenance Practices for Cryogenic Pumps in Semiconductor Manufacturing.
Erik Collart, Andrew Longley, Dirk Gordon, John Nordquist, Paul Matthews, Edwards Vacuum
3:25
12.4 Integrated Circuit Die Performance Prediction Using Deep Learning.
Alexander Kovalenko, Petr Lenhard, Radomir Lenhard, Inference Technologies
3:50
12.5 Developing a Digital Twin of a Polymerization Reaction for Process Optimization.
Balazs Bordas, Kutup Kurt, Andreas Bamberg, Sebastian Engell, EMD Electronics