Yield Enhancement / Yield Methodologies 1
Chairs: Ishtiaq Ahsan, Shiv Mishra, Gary Green
Yield improvement is one of the primary goals of any volume manufacturing, which requires not only eliminating defects, but also resolving parametric, design marginality and systematic problems. In this session we will have presentations which highlight yield issues and their resolutions that were seen in respective industries. Authors will be discussing defectivity impact to MIM capacitors used in the automotive industry, New Yield calculation methodology for Analog computing using Phase Change Memory, CMP optimization in memory, design marginality, mitigation of dislocations seen in deep trench isolation.
Tuesday, May 3, 2022
9:50 AM ET
1.1 A Perspective of MIM Defect Density Performance Improvement for Automotive Chip Fabrication.
Ee Jan Khor, Ramasamy Chockalingam, Jian Xun Sun, Kwang Sing Yew, Wei-Hui Hsu, Zin Tun Thant, Pannirselvam Somasuntharam, Hin Kiong Yap, Juan Boon Tan, Globalfoundries.
10:15
1.2 Yield Methodology and Learning in Phase Change Memory (PCM) technology for Analog Computing.
Victor Chan, Arthur Gasasira, Ruturaj Pujari, Richard Southwick, Injo Ok, Samuel Choi, Claire Silvestre, Prasad Bhosale, Geoffrey Burr, Nicole Saulnier, Sean Teehan, Ishtiaq Ahsan, IBM
10:40
1.3 Robust Process Development for Dislocation Free DTI Formation.
Qiong Luo, Jing Yan Huang, Jianbo Zhou, Shiang Yang Ong, Globalfoundries
11:05
1.4 Multiphased Process Optimization for CMP Variation Reduction in High Volume Manufacturing.
Russell McCabe, Ritesh Ray Chaudhuri, Samantha Spangler, Femi Aborisade, Raita Hoech, Micron Technology
11:30
1.5 Yield Improvement Methodology with Addressing Design Systematics During Production Ramp-Up.
Jianhua Yin, Ian Chen, Rakesh Chokanathan, Suraj Gyawali, Yuchen Du, Yuansong Wang, Xuemei Liu, CT Lim, Wen Zhi Gao, Globalfoundries