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Environment, Health and Safety

SEMI is committed to environmentally sound policies and the health and safety of the community that works in the electronics supply chain.

SEMI focuses on global EHS issues, such as regulatory compliance, and other topics that can influence the advancement of EHS within the industry. As a member-driven collaborative platform, SEMI facilitates industry-wide efforts that member companies believe would be more effectively undertaken by the industry association and cross-industry working groups.

Beyond advocacy, SEMI members are also actively engaged in developing EHS standards. SEMI Standards have been widely adopted within the Industry and can be accessed here.

EH&S Areas of Activity


The SEMI International Standards Program brings together industry experts to exchange ideas and work towards developing globally accepted technical standards. SEMI provides a forum for the essential collaborations that move new and existing markets forward efficiently and profitably.

SEMI EH&S Standards, commonly known as the S Series, are relied on by manufacturing facilities and their suppliers, worldwide, to help ensure the safety of those working in the microelectronics manufacturing industry. The all-volunteer committee identifies and develops international environmental, health, and safety (EHS) Standards fulfilling the technical needs of the semiconductor, flat panel display and other related industries.  Read more about the SEMI Standards program.  

SEMI provides a gathering place to share best practices and the role of the microelectronics manufacturing and design industries in creating a sustainable planet.  Read more.

SEMI EHS has a working group addressing member compliance issues related to the EU RoHS regulation.  Learn more by reading our whitepapers.

The SEMI EHS PFOA Working Group works on understanding the impact of PFOA on the semiconductor manufacturing supply chain.  Read the SEMI consensus recommendations.

SEMI PFOA Primer V1.3   in English  in Japanese

PFOA FAQ  in English  in Japanese


SEMI Award for Outstanding EHS Achievement

SEMI® presents this award in memory of Akira Inoue. Mr. Inoue was an impassioned and articulate advocate of environmental responsibility and truly believed that it must permeate our industry. He felt that environmental health and safety issues should be considered for the long term, and that the current generation must not leave a tremendous bill to be paid in the future by our children and grandchildren.


SEMI Staff Members Focusing on Environment, Health, and Safety


Senior Manager, Global EHS & Advocacy
SEMI Milpitas, USA
Tel: +1.408.943.7977


Senior Manager, Standards, EHS & Advocacy 
SEMI Japan, Tokyo
Tel:  +81.3.3222.5819


Senior Manager, Advocacy & Public Policy
SEMI Europe, Belgium
Tel: +32 (0) 2 609 53 18