Thirty years of experience in the area of electronic design automation (EDA) for MEMS, sensors, and analog circuits and their packaging. Developed software tools that are used throughout the MEMS and semiconductor industries for design and analysis of MEMS products including pressure sensors, microphones, energy harvesters, optical MEMS, inertial MEMS, magnetic MEMS, RF switches, SAW/BAW filters, thermal actuators and sensors, biosensors and medical devices. Focused experience in MEMS fabrication modeling, Digital twins of MEMS devices, MEMS/IC co-design and system modeling, and simulating environmental and packaging effects on MEMS device performance.
Mary Ann Maher
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