Smart Manufacturing 1: IE / OR / WFO
Session Chairs: Shiladitya Chakravorty, Dave Gross, Misty Thompson
The availability of vast amounts of data is now being met with increasing compute capabilities and algorithmic approaches to predict properties of final products, equipment health and metrology results, and influence WIP flow decisions.
Tuesday, May 14, 2024
3:25PM ET
8.1 AI-Powered Process Optimization for EUV MOR: Equipment Trace Data Feature Extraction and Machine Learning is Essential for CD Control
M. Faria, F. Ortega, B. Finlay, E. Holzer, Tignis; S. Gucci, Tokyo Electron; N. Latham, IBM Research
8.2 Scheduling Semiconductor Manufacturing Operations in Research and Development Environments
V. Borodin, IMT Atlantique; V. Fischer, Univ. Grenoble Alpes; A. Roussy, C. Yugma, Mines Saint-Etienne, University Clermont Auvergne
8.3 Leveraging the Data Continuum for Advanced Root Cause Analysis
P. Barar, Synopsys; E. McCormick, Qorvo