MS: Manufacturing for Sustainability
Session Chairs: Jean Wynne, Jerry Brady, Ralf Buengener
Novel ideas in the fab to reduce the impact of semiconductor manufacturing on the environment through efficiency optimization. Topics are focused on reducing waste, emissions, and energy consumption during wafer fabrication.
Tuesday, May 14, 2024
11:05 AM ET
4.1 Electrochemical Innovations for Sustainable Copper Management in Semiconductor Wastewater
C. Lippert, J. Landon, A. Rassoolkhani, ElectraMet; J. Keleher, Lewis University
4.2 Sustainability Model for Semiconductor Manufacturing
E. Qi, T. Luo, M. Wick, M. Raiford, T. Martinez, S. Mittal, Applied Materials
4.3 In-House Test Wafer Reclaim for Fab Cost and Wastage Reduction
X. Dong, S. Mukherjee, M. Asokan, Y. Yang, V. Duvvuru, Micron Technology
4.4 A Noble Cause: Reduction of Ne and Xe Consumption for Gas Laser Mixtures
K. Brockhaus, H. Bernhardt, J.C. Calvo Blanco, S. Koppetzki, S. Onishi, T. Richter, O. Storbeck, Infineon Technologie