Factory Automation
Session Chairs: Stefan Radloff, Thomas Beeg, Thirumalesh Bannuru, Jan Rothe
Factory Automation includes both the software systems that enable all aspects of the semiconductor manufacturing process, as well as the hardware, or Automation Material Handling System, that stores and moves materials throughout the factory. As process complexity increases, Factory Automation plays a more and more crucial role in generating additional output in highly complex wafer fabs. In this session we will hear about 3 successful projects which look at the scheduling, algorithm, and machine learning side of factory automation.
Thursday, May 16, 2024
8:00AM ET
18.1 Autonomous Robot Orchestration Solution for OHT with Machine Learning and Digital Twin
J. Park, S. Hong, I. Hwang, S. Hwang, DAIM Research; D. Shin, SK Hynix; J. Lee, J. Lee, Y. J. Jang, KAIST
18.2 Deploying an Advanced Scheduling Solution to Optimize Conflicting KPIs in the Diffusion Area at Renesas Electronics
S. Elaoud, L. Weinstock, J. Adamson, D. Xenos, Flexciton; J. Maguire, Renesas Electronics
18.3 Multi-Objective Sort Job Optimization for Wafer Bonding Tools
D. Pabst, S. Ramakrishnan, J. DeLong, S. Chakravorty, GlobalFoundries