Smart Manufacturing 2: AI / ML
Session Chairs: Shiladitya Chakravorty, Dave Gross, Misty Thompson
The availability of vast amounts of data is now being met with increasing compute capabilities and algorithmic approaches to predict properties of final products, equipment health and metrology results, and influence WIP flow decisions.
Wednesday, May 15, 2024
3:05PM ET
16.1 Supporting Fab Operations Using Multi-Agent Reinforcement Learning
I. Sood, A. Kaushik, T. Bulgerin, P. Kumar, S. Rath, A. Khemiri, J. Bédorf, minds.ai; S. Hsu, J. Chang, Micron Technology
16.2 Feedback Control in Station Dispatching to Improve Constraint Tool Output in 300MM Fabs
M. Krishna, D. Mosgrove, M. Kalmus, R. Madson, M. Arca, C. Merrill, A. Trimeloni, Z. Zhao, Intel Corporation
16.3 Accelerating Chamber-to-Chamber Matching Using AI
E. Pitz, L. Medina, M. Chopra, SandBox Semiconductor
16.4 Selective Auto-Labeling for Deep Learning-Based Domain-Specific Image Classification in Manufacturing
J. Park, W. Ki, Y. Lee, M. Choi, J. Park, J. Park, Y. Kim, Samsung Electronics