Letter Ballots
Letter ballots are periodically issued by SEMI Standards. The letter ballot is the first step in the approval process required for publication of a new or revised standard.
Cycle 06-26 is now open. The last day for voting is July 02, 2026.
SEMI Standards Critical Dates
Document submission deadlines and voting periods for upcoming technical ballots.
How to Vote on SEMI Standards Ballots
Detailed instructions on how to view ballot files and how to vote on SEMI Standards ballots. Includes screenshots.
Informational Ballots
Informational ballots are used to receive comments and refine a standards draft document prior to being issued as a Letter Ballot.
Recently Approved Ballots
Draft Documents recently approved by various Technical Committees. Pending successful procedural review, these Documents will be approved for publications.
Procedural Review Results: May 2026 | March 2026 | January 2026 | November 2025 | August 2025 | July 2025 | May 2025 | April 2025 | January 2025
The ISC A&R SC shall determine whether the procedural requirements of these Regulations have been met and whether a satisfactory consensus has been reached on standards actions. (Regulations ¶ 11.1).