Overview
Since 2018, the SEMI Voltage Sag Task Force—comprising Fabs, Utilities, OEMs, Tool Suppliers, and EPRI—has collaborated to address a persistent challenge: why do tools remain vulnerable to voltage sags despite the implementation of SEMI F47?
Over seven years, the task force has investigated the power quality environment, tool susceptibility, testing methodologies, and mitigation strategies. This deep dive has led to actionable recommendations for strengthening the SEMI F47 standard and improving tool resilience in future builds.
What to Expect
Join us for a comprehensive workshop that will:
- Review the task force’s findings and collaborative efforts
- Share insights from key stakeholders
- Present proposed revisions to the SEMI F47 standard
- Discuss how these updates can enhance tool performance and reliability
Presentation slides
Enhancing Voltage Sag Immunity: SEMI F47 Standard Updates & Insights
Access SEMI Standards mentioned in presentations
SEMI F47: Specification for Semiconductor Processing Equipment Voltage Sag Immunity
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SEMI F49: Guide for Semiconductor Factory Systems Voltage Sag Immunity
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Join the Voltage Sag Immunity Task Force and contribute to the document development of SEMI F47
Become a SEMI Standards Program Member - Reach out to Laura Nguyen