Enhancing yield, reliability, and operator efficiency is paramount in semiconductor manufacturing. Performing macro inspection is pivotal for identifying defects that compromise yield. High-speed macro inspection with wafer randomization allows for early detection, limits active excursions, and identifies long-term chronic yield issues. Slot-positional analysis of randomized wafers has been around for decades. Fab’s systematically alter and track wafer positions at multiple points throughout the line. Correlating yield patterns to wafer positions allows process/equipment issues to be quickly identified. Microtronic’s EAGLEview EV6 can automatically inspect 3,000 WPD while simultaneously randomizing wafers, the platform has become integral to our customer’s inspection strategy.
The Microtronic Application Director will be performing a live demonstration of ProcessGuard software throughout the presentation and showing real-life case study examples from the fab:
#1 [EBR Drip Excursion] - Low-frequency intermittent defect root cause solved.
#2 [3-Chamber BPSG Issue] - Topography-related significant yield loss.
#3 [Photo Flash Field Defects] - Common photo issues present customer returns and reliability risks.
#4 [AI Deep Learning ADC] - Integration into Customer's AI Engine for ADC and Microtronic's ongoing AI effort.
Presentation Slides
Wondering what Fab Owners Alliance (FOA) is?
- It’s one of the most valuable things you’ll find at SEMI (and free with your SEMI membership!)
- The FOA Spare Parts Network alone could save you months of tool downtime for hard-to-find spares.
- Getting your fab engineers involved in the various task forces will certainly help them.
- The survey service is also invaluable, any time someone on your team thinks “I wonder how other fabs solve this problem…”
- Contact Karim Somani (Sr. Program Manager, FOA) – [email protected]