In this presentation, Ebara will discuss how the subfab is crucial to the fabs operations.
- Ensuring the subfab ecosystem operates smoothly takes considerable effort and coordination between the Device Manufacturers and suppliers.
- Major challenges include the PAC, (pumps, abatement, chillers) keeping the equipment operational, maintained and supported by qualified personnel.
- Additional regulations and sustainability initiatives are pushing mature technologies to their limits to meet corporate goals.
This webinar focuses on methods and solutions to overcome some of these challenges.
- Speaker: John Makin
- Sr. Applications, Channel Sales & Product Marketing Manager
- With over 20 plus years’ experience supporting vacuum pump and exhaust management John is the Sr. Applications, Channel Sales and Product Marketing Manager for Ebara Technologies Inc. Global Vacuum Components Division.
Presentation Slides
Wondering what Fab Owners Alliance (FOA) is?
It’s one of the most valuable things you’ll find at SEMI (and free with your SEMI membership!)
The FOA Spare Parts Network alone could save you months of tool downtime for hard-to-find spares.
Getting your fab engineers involved in the various task forces will certainly help them.
The survey service is also invaluable, any time someone on your team thinks “I wonder how other fabs solve this problem…”
Contact Karim Somani (Sr. Program Manager, FOA) – [email protected]