MEMBER DIRECTORY

SUSS is a leading supplier of equipment and process solutions for microstructuring in the semiconductor industry and related markets. In close cooperation with research institutes and industry partners SUSS contributes to the advancement of next-generation technologies such as 3D Integration and nanoimprint lithography as well as key processes for MEMS and LED manufacturing. With a global infrastructure for applications and service SUSS supports more than 8.000 installed systems worldwide. SUSS is headquartered in Garching near Munich, Germany.

At SPS, we're dedicated to driving technological innovation forward and leading the charge towards a more sustainable future. With over 35 years of experience in the semiconductor industry, we're dedicated to helping our customers succeed and driving progress for a better future. As a key player in the industry, we take pride in our role, offering cutting-edge solutions, deep expertise, and exceptional service to our customers. In today's rapidly evolving landscape, our customers face constant pressure to produce smaller, smarter and more efficient microchips while maintaining high standards of cleanliness. Leveraging our expertise in wafer handling and wet process equipment, we're here to guide our customers through every step of their semiconductor processes, providing a comprehensive range of advanced products and tailored solutions. Our own brands: waferhandlingsystems.com | sps-polos.com | esproflow.com | spincoating.com

SENTECH Instruments develops, manufactures, and sells worldwide advanced quality instrumentation for plasma process technology, thin-film metrology. SENTECH plasma process systems, including ALD and ALE, support leading-edge applications. They feature high flexibility, reliability, and value for money. SENTECH develops and manufactures in-house and thus allows for customer-specific adaptations for research facilities and industry. We specialise in applications for optoelectronics, MEMS, sensors, power devices and quality control. SENTECH offers a broad range of automated and semi-automated spectroscopic ellipsometers, laser ellipsometers, and reflectometers for the reliable and precise measurement of thickness and optical constants on thin films and layer stacks.

SEMILAB provides state-of-the-art process control and metrology solutions for semiconductor wafer and device manufacturers, as well as the solar and display industries worldwide. With over 300 unique products, our growing portfolio offers a wide range of optical and electrical measurement technologies, from tabletop to inline solutions. LST is the industry standard for monitoring and analysis of bulk microdefects, while Semilab AFM enables nanoscale surface roughness monitoring and defect review of Si, SiC, and GaN samples. PMR monitors various ion implantation parameters in Si and SiC wafer production. EIR is designed for epitaxial thickness characterization. uSE offers high-throughput thin film characterization. En‑Vision targets non-destructive detection of buried defects. Semilab covers the full R&D lifecycle, from research and metrology development to manufacturing and implementation, enabling efficient production control while ensuring an exceptional user experience.

We supply Wafer Handling, Metrology and Consumables. Products include Batch Wafer Transfer systems and Wafer Loading Systems for process tools including 300mm technologies, FOUP stockers. Non-Contact Sheet resistance and Bulk resistivity measurement for X-low Ohms to k-Ohms, conductivity type analyzer, Thin Film meurement system and Profiler.

AES motomation provides clean room handling solutions for the semiconductor, flat panel display and solar industry. We offer a variety of atmospheric and vacuum handling robot systems as well as Load Ports. Integrated solutions range from modules such as EFEMs and vacuum transfer chambers up to fully integrated complete handling platforms. Our solutions are based on a wide variety of products which we also customize to exactly meet specific customer requirements. Our Auto-Teaching solution allows the robot to use a sensor carrier to learn all teach positions within the entire tool independently, requiring no external assistance. This significantly shortens the initial tool set-up time, as well as any down time in the field for re-teaching purposes.

Nova is a leading innovator and key provider of process control solutions for advanced process control in the semiconductor industry.

DAS Environmental Expert is a leading environmental technology company that provides sustainable solutions for waste gas abatement and waste water treatment while minimizing resource usage. The family-owned, mid-sized business with headquarters in Dresden, Germany stands out with more than two decades of technology and market know-how. Our worldwide employees further develop this knowledge every day. Every one of them is an Expert in his or her own field. This enables us to offer products and services that set the highest international standards. That is what we want to express when we say “Environmental Expert”.

Intergrated Logistics Services: Full service portfolio of door to door equipment logistics, cleanroom "move-in", procurement logistics (own teams and equipment), spare parts logistics, PV Quality testing, ramp up of new fabs up to distribution of finished and semi-finished products and in-house services. With 24/7 service, worldwide network of warehousing and distribution centers, quality assurance by ISO and global key account management, Schenker understands, consults and supports the worldwide high-tech logistics requirements.

ASML is one of the world's leading providers of lithography systems for the semiconductor industry, manufacturing complex machines that are critical to the production of integrated circuits or microchips. Headquartered in Veldhoven, the Netherlands, ASML designs, develops, integrates, markets and services these advanced systems, which continue to help our customers - the major chipmakers - reduce the size and increase the functionality of microchips, and consumer electronic equipment.

Edwards is a leading manufacturer of sophisticated vacuum products and abatement systems and a leading provider of related value-added services for the manufacture of microelectronics devices, including silicon and compound semiconductors. Our innovative leading technology solutions are designed to maximize process uptime, yield and throughput, whilst striving to balance the often conflicting requirements of: lower cost of ownership through reduction in consumables usage (electrical power, fuel gas, nitrogen and cooling water); reduced environmental emissions and safety compliance (noise, vibration, sub-fab particles, waste gas and waste water); extended product lifetimes and reduction in on-going service costs.

AGRU is a leading manufacturer and supplier of high-purity thermoplastic piping systems. These systems are used for the transport of ultra-pure media as well as waste water process and chemical drain in Semiconductor Fabs. PURAD systems are manufactured from PVDF-UHP, PP-Pure (PPR-Gray), Polypure (PPR-Natural) and ECTFE. They are available in a wide range of pipe sizes up to DN/OD 400 mm. The product range includes pipes, fittings, valves, flow control components and semi-finished products. The piping systems are joined using fully automated infrared (IR) and electrofusion AGRUWELDING machines. This ensures high reliability and consistent joint quality. For more information about AGRU’s products and worldwide sales offices, please contact [email protected]

Plan Optik AG, a high tech glass processor, existing since 1962 and based in Germany, has focused more and more on MEMS related products from glass or similar materials (mainly borosilicate glass wafers used for wafer level packaging of MEMS). Within the last years, Plan Optik - Wafers set the standard for glass wafers of this still young market.This success is driven by the development of own manufacturing methods e.g. for the polishing of glass wafers. So called MDF (micro damaging free) polished wafers show an impressive surface quality (no sub surface damaging) and are suitable for safety relevant devices such as tyre pressure sensors. No sub-surface-damaging means a dramatically increased yield during etching processes. Additionally the surface roughness is much below 5 Angstrom (0.5 nm) - this makes them suitable for direct bonding.The chips manufactured with Plan Optiks wafers are already implemented in more than 100 million sensors and micro fluidic systems per year.Our structured wafers are used in active components of micro fluidic and lab-on-chip devices. This includes Nano-Dispensing-Systems and Nano-Vaporizers for medicament administration.In the near future the technologies developed and used by Plan Optik will set new standards in consumer electronics - especially (more...)

Analysis/Measurement: Film Thickness, Microscopes, Probing Equipment/Accessories, Surface Inspection/Flatness - Surface and defect inspection, SEM CD Overlay. Assembly/Hybrid Equipment: Automation & Robotics, Burn-In, Cleaning Equipment, Inspection. FLAT PANEL DISPLAY (FPD) - Materials: Developer/Stripping & Cleaning/Etchants/Other. FLAT PANEL DISPLAY (FPD) - Processing Equipment: CVD, Wet Etching/Stripping. FLAT PANEL DISPLAY (FPD) - Test/Measurement/Repair Equipment: Optical Test, Surface Inspection/Flatness, Thickness Measurement. Photomask Equipment/Materials: Mask Making Equipment. Process Equipment: Handling/Transfer/Linear Motion Systems, Inspection Equipment, Laser Beam Equipment, Flat Panel Display, Manufacturing Equipment. Services: Training.