| | | | |
会長 (Chairman) | 副会長 (Vice Chairman) |

| 常石 哲男
代表取締役会長
東京エレクトロン(株) | 
| Bertrand Loy
President and CEO
Entegris |
| | |
会計責任者 (Secretary/Treasurer) | 会計責任者 (Past Chairman) |

| Mary G. Puma
Chairman and CEO
Axcelis Technologies, Inc | 
| Yong Han Lee
Chairman
Wonik |
| | | |
| 役員 | | |

| Mike Allison
President, Semiconductor Division
Edwards | 
| Stephen S. Schwartz
Chief Executive Officer
Brooks Automation |

| Martin Anstice
President
Lam Research | |

| Kevin Crofton
President and COO
SPTS Technologies | 
| Kyu Dong Sung
Chief Executive Officer
EO Technics |

| Jon D. Kemp
President
Dupont Electronics & Communications | 
| Xinchao Wang
Chairman
JCET |

| 小柴 満信
代表取締役社長
JSR株式会社 | 
| Tien Wu
Director
Chief Operating Officer
ASE Group |

| Sue Lin
Vice Chairman
Hermes Epitek Corp. | 
| Guoming Zhang
Executive Vice President
Naura |

| Ajit Manocha
President & CEO
SEMI | | |

| 村田 大介
代表取締役社長
村田機械株式会社 | | |
| | | |
| |
名誉役員 (Directors Emeritus) |
Edward H. Braun
Chairman
Veeco Instruments, Inc. | Joel A. Elftmann
President
Custom Fab Solutions |
東 哲郎
取締役相談役
東京エレクトロン(株) | Archie Hwang
Chairman and CEO
Hermes Epitek Corp. |
Kenneth Levy
Chairman Emeritus
KLA-Tencor | James C. Morgan
Chairman Emeritus
Applied Materials, Inc. |
Stanley T. Myers
President
S.T. Myers & Associates | Ed Segal
Former Chairman/CEO
Metron Technology |
関家 憲一
ディレクター・エメリタス
(株)ディスコ | 吉田 庄一郎
特別顧問
(株)ニコン |
Arthur W. Zafiropoulo
Chairman and CEO
Ultratech, Inc. | |