LOT Vacuum Co., Ltd.

LOT Vacuum, the company for developing, manufacturing, and marketing Vacuum Pump for processing semiconductors and LCD markets, began its business with undertaking DryVacuum pump business part Leybold in Germany. DuraDry™ Series, the original product name of LOT Vacuum, adopted innovative Split-Flow Screw Design, so that it can correspond to all processes of semiconductor and LCD based on improved performance and credibility. DuraDry™ Series has been approved by customers for its outstanding ability to handle Heavy Duty Application which produces massive amount of process by-products. Furthermore, to answer the needs of lower power consumption in various of industries, LOT VACUUM developed HD series for process, RD series for loadlock, and VD series for general industries.