CI systems develops and manufactures in-situ, non-contact, wafer temperature monitoring and metrology systems. Applications include PVD, HDP-CVD, RTP and other processes. Our leading product, the NTM500 is a wafer temperature monitor incorporating real time, same point, emissivity measurement and compensation. CI also develops additional technologies in the field of new dielectric materials analysis by means of novel spectroscopic methods (e.g. Raman, fluorescence, etc.).
Primary Product Category
Equipment and Sub-Systems
Primary Product Sub Category
Industrial Park, Ramat Gabriel, PO Box 147