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SEMI Standards Committees

SEMI brings together industry experts through a number of committees to develop globally accepted technical standards. These Standards Technical Committees provide the forum for the essential collaborations that must be achieved to move new and existing markets forward efficiently and profitably. Choose a committee below to learn more about activities including charter and scope where available in that area.

Committee Information

Committee Document Activity

  • SEMI Standards Document Status
    All current SEMI Draft Documents and their status can be found here.

  • TFOFs and SNARFs
    The TFOF (Task Force Organization Form) and the SNARF (Standards New Activity Report Form) are the methods for introducing and defining new activities.

Committee Meeting Activity

Collaboration Community

 Join today! Complete and submit a SEMI Standards Membership Application Form