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Event Sponsors

 

DAS Logo 140 pixel version 2


DAS Environmental Expert GmbH is one of the world's leading producers of waste gas treatment technologies in high-tech manufacturing. The company develops and produces innovative and scalable point-Of-Use waste gas abatement solutions and concepts for wastewater treatment as well as for water recovery for industrial customers and municipalities. The headquarters of the company, founded in 1991, is in Dresden. In addition, DAS EE is represented by its own subsidiaries in Asia, the United States South America. Currently, there are around 480 employees worldwide at DAS. www.das-ee.com

 

 

Ebara Logo

 

EBARA Precision Machinery Europe is a leading global supplier for vacuum solutions and wafer processing systems. The EBARA components portfolio includes a wide range of dry and turbo molecular vacuum pumps as well as gas abatement systems. In addition EBARA markets leading edge CMP, electroplating and bevel polishing systems.

Customers value the quality, stability and low cost of ownership of EBARA products. With its 150 employees EBARA Precision Machinery Europe (EPME) sells products, customized solutions and supports its large installed product base throughout Europe, Israel and Russia.

For more information, please visit www.ebara-pm.eu or www.ebara.co.jp

 

 

Edwards logo


EDWARDS WORLD-CLASS SOLUTIONS 

We offer a unique range of equipment solutions, support services and technical expertise to meet application needs in the manufacture of microelectronic devices, including silicon and compound semiconductors.

We continue to innovate leading technology solutions which will improve your process up-time, yield, throughput and safety compliance whilst striving to balance the often conflicting requirements of lower cost of ownership through reduced environmental emissions and extended product lifetimes with a reduction in on-going service costs.

Serving all leading process tool OEMs and with a presence at every major semiconductor fab in the world, our systems are designed to meet the specific requirements of existing and developing processes. A variety of systems, such as dry vacuum pumps, turbomolecular pumps and point-of-use abatement systems are offered to optimise performance across the range of applications, from light duty to the heaviest duty processes.

For more information, please visit www.edwardsvacuum.com

 

 

TEL


As a leading global company of semiconductor and flat panel display (FPD) production equipment, Tokyo Electron Limited (TEL) engages in development, manufacturing, and sales in a wide range of product fields. All of TEL's semiconductor and FPD production equipment product lines maintain high market shares in their respective global segments. TEL provides outstanding products and services to customers through a global network in the U.S., Europe, and Asia.    www.tel.com

 

 

Watlow

 

Watlow provides semiconductor development teams with innovative thermal systems that give equipment manufacturers a unique competitive advantage. We do this through engineering collaboration and deep domain knowledge delivering high performance solutions at your pace. Watlow has a wide range of products and services to improve wafer processing performance from the process chamber to the abatement system. Our innovative solutions are focused around heaters, temperature sensors, electronics and controls, precision bonded assemblies and cleaning and refurbishment. We can provide standard product offerings or develop custom integrated system solutions.    
By partnering with Watlow, you can take advantage of our extensive expertise, as well as our vast selection of efficient thermal components.
For more information, please visit www.watlow.com

 

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