SEMI Standards Meetings at SEMICON Europa 2012

SEMI Standards Meetings at SEMICON Europa 2012

The SEMI Europe Standards meetings were held on October 8-11 in conjunction with SEMICON Europa 2012 in Dresden, Germany.  Participants from the European Technical Committee meetings took the opportunity to visit to SEMICON Europa show and attend various technical conferences. The week ended with the HB-LED task force meetings and the European Regional Standard Committee (ERSC) meeting.

The main highlights of the Standards meetings are as follows:

Gases & Liquid Chemicals

Two new Documents passed technical committee review and are pending final approval by the Audits & Reviews Subcommittee:

  • [Ballot #5328] New Standard: Guide for Tris(Dimethylamino) Silane (3DMAS)
  • [Ballot #5329] New Standard: Guide for Tetrakis(Dimethylamino) Silane (TDMAS)

Six new activities (SNARFs) were approved:

  • [SNARF #5491] New Standard: Guide for Titanium Tetrachloride (TiCl4)
  • [SNARF #5492] New Standard: Guide for Ethylene Glycol
  • [SNARF #5493] New Standard: Guide for Octa Methyl Cyclo Tetra Siloxane (OMCTS)
  • [SNARF #5494] New Standard: Guide for Tetra Methyl Cyclo Tetra Siloxane (TMCTS)
  • [SNARF #5495] New Standard: Guide for Cyclo Hexanone
  • [SNARF #5496] Revision to SEMI XXXX:  Guide for Tetrakis(Dimethylamino) Silane (TDMAS)

Eight Documents were authorized for balloting in Cycle 1, 2013:

  • Ballots (see above): #5491, #5492, #5493, #5494, #5495, #5496
  • [Ballot #5324] New Standard: Guide for Cyclopentanone
  • [Ballot #5326] New Standard: Guide for Methyl Isobutyl Carbinol (MIBC) or 4-Methyl 2-Pentanol

Compound Semiconductor Materials

Two SNARF were approved (SEMI M82 andM83 revisions) and will be submitted for balloting in Cycle 1, 2013:

  • [#5498] Revision to SEMI M82, Test Method for the Carbon Acceptor Concentration in Semi-Insulating Gallium Arsenide Single Crystals by Infrared Absorption Spectroscopy
  • [#5499] Revision to SEMI M83, Determination of Dislocation Etch Pit Density in Monocrystals of III-V-Compound Semiconductors 

One Document (Specification for 150mm Silicon Carbide single-crystalline Substrates, #5370) will also be submitted for balloting in mid-2013.

Silicon Wafer

One SNARF was approved (New Standard Specification for Polished Single Crystal Silicon Wafers for GaN-on-Silicon Applications, #5500) and will be submitted for balloting by mid-2013.

-        1 Document (Revision to SEMI M73-0309, Test Methods for Extracting Relevant Characteristics from Measured Wafer Edge Profiles; #5430A) was authorized and will be submitted for balloting in Cycle 1, 2013.

Equipment Automation

One SNARF and TFOF approved for SEMI E48 (Specification for SMIF Indexer Volume Requirement) revision with plans to for balloting by mid-2013.

EHS

One Document passed technical committee review (Revision to SEMI S25, Safety Guideline for Hydrogen Peroxide Storage & Handling Systems) and is pending final approval by the Audits & Reviews Subcommittee.

One Document (Revision to SEMI S10, Safety Guideline for Risk Assessment and Risk Evaluation Process) was authorized and will be submitted for balloting in 2013.

PV Materials

One Document (Test Method for In-Line Measurement of Waviness of PV Silicon Wafers by a Light Sectioning Technique Using Multiple Line Segments, #5333) passed technical committee review and is pending final approval by the Audits & Reviews Subcommittee.

Two new activities (SNARFs) were approved

  • [SNARF #5531] Line item revision to PV40, Test Method for In-Line Measurement of Saw Marks on PV Silicon Wafers by a Light Sectioning Technique Using Multiple Line Segments
  • [SNARF #5530] New Standard: Specification for Orientation Fiducials for PV Silicon Wafers

One Document (Test Method for In-Line Measurement of Lateral Dimensions of PV Silicon Wafers, #5434) was authorized and will be submitted for balloting in Cycle 1, 2013.

PV Automation

One Document (Revision to SEMI PV34-0712, with title change to: Practice for Assigning Identification Numbers to PV Si Brick, Wafer and Solar Cell Manufacturers; #5388) passed technical committee review and is pending final approval by the Audits & Reviews Subcommittee.

One new activity (Revise the scope of doc #5418 by adding a second method to PV29 in the SNARF) was approved with plans to submit for balloting in Cycle 1, 2013.

The next SEMI Europe Standards meetings are scheduled in conjunction with the 7th PV Fab Manager Forum in Berlin in March 10-13, 2013. The tentative schedule includes PV Automation TF and Committee meeting on March 12th and PV Materials TF and TC on March 13th. Winners of the European SEMI Standard Awards will be announced during the PV Fab Manager Forum. In addition, chairs of the European Regional Standard Committee will take the opportunity to hold the annual Strategy and Planning Meeting at the end of the week in Berlin. Please contact Yann Guillou (yguillou@semi.org) for more information or to provide comments.

SEMI, Standards Watch, December 2012