SEMI Technical Standards Meetings and Programs at SEMICON Korea 2013

The SEMI Korea Standards Meetings and programs will take place on January 30 – February 1 at COEX, Seoul in Korea in conjunction with SEMICON Korea.

Meetings

• Facilities (Agenda)
• Information & Control (Agenda)
• FPD Metrology (Agenda)

STEPs

• GEM/SECS (Agenda)
• 450mm (Agenda)