Japan Update: New Working Group Formed on Seismic Protection

Japan Update: New Working Group Formed on Seismic Protection

By Akiko Yamamoto, SEMI Japan

The Japan Environment, Health, and Safety (EHS) Technical Committee approved to form the Seismic Protection Working Group at their meeting on September 26, 2011. The proposal was motivated by Japan and Taiwan, both of whom are particularly susceptible to earthquakes.

The recent devastating Great East Japan Earthquake/ Tsunami which impaired the semiconductor industry generated momentum toward international efforts for review and improvements of seismic protection related sections in SEMI Safety Guidelines. SEMI S2 (EHS Guideline for Semiconductor Manufacturing Equipment) and SEMI S26 (EHS Guideline for FPD Manufacturing System) to provide guidance on seismic protection design. However, the guidance is based on the experiences of both the Great Hanshin-Awaji Earthquake in 1995 and the Taichung Earthquake in 1999 as well as 1997 version of U.S. Uniform Building Code (UBC). It may be the time for review their effectiveness and reflect the recent experiences to the SEMI Safety Guidelines.

The Seismic Working Group was setup for the purpose of starting discussion on related topics. If they agree in the future discussion, they may submit a TFOF to start document development work. The Working Group will be led by Shigehito Ibuka (Tokyo Electron).

Workshop in conjunction with SEMICON Japan 2011

As a part of gaining feedback from the industry, “Seismic Protection and SEMI Safety Guidelines” was held on Wednesday, December 7 in conjunction with SEMICON Japan 2011. The following is its overview:

Based on the experiences of both the Great Hanshin-Awaji Earthquake in 1995 and the Taichung Earthquake in 1999 as well as U.S. Uniform Building Code (UBC), SEMI S2/ S26 provide guidance on seismic protection design. However, some of their information seems insufficient compared to SEMI S17 (Safety Guideline for Unmanned Transport Vehicle (UTV) Systems), which is recently revised to cover up-to-date seismic protection standards and studies. It is also reported that the industry made good use of SEMI S12 (EHS Guideline for Environmental, Health and Safety Guideline for Manufacturing Equipment Decontamination) for decontamination after the Tohoku Earthquake. In this program, usefulness of existing SEMI Safety Guidelines is reviewed, and lessons learned from the past great earthquakes as well as items that should be updated are discussed.

Key speakers from TSMC, Dainippon Screen Manufacturing, Tokyo Electron, Takenaka Corporation, Belfore Japan, etc. presented.

For more information on the said Working Group and Workshop, contact Akiko Yamamoto at SEMI Japan.

SEMI Standards Watch, December 2011