Sal Di Iorio
Semi-Tech Group\Revasum
Project Lead, Revasum Connect
During his career Mr DiIorio has been involved with nearly all aspects of the semiconductor industry, including R&D, Process and Equipment Engineering, IT and software deployment. Through it he has employed computerized data analysis to transform raw data into usable information to drive process and equipment reliability improvement programs. Mr DiIorio has been involved in SEMI Standards, specifically the Metrics TC and the RAMP associated Standards (E10, E58 and E79) sub-committees and task forces. He is presently heading a project at Revasum to gather equipment RAM (E-10) performance data from customers to help identify equipment issues, in order to focus reliability improvement projects.
Equipment Performance Data Sharing and IP Concerns, An OEM Perspective
With the ever-increasing complexity of semiconductor processing equipment comes the challenge of making the system as reliable as possible. More complex systems mean more opportunities for the equipment to be in a condition where it cannot “perform its intended function”. These occurrences are categorized in SEMI E10 as “downtime”, and it is the responsibility of the OEM to reduce these occurrences, in order to keep the equipment available to the end user (Fab).
In order to improve reliability and maximize MTBF, the OEM needs to be aware of and understand all the downtime incidents, not only those which Field Service responds to. Included in the supporting data for the individual incidents are the system log files, which are often too large to send via email. In order to support this kind of big data collection, automation is required.
Understanding the root causes of failures in the field provides Engineering with the direction to address issues which are affecting all customers. Additionally, understanding the specific needs of a customer whose data may not reflect the “rest of the world” provides the OEM with an opportunity to assist the customer with their specific issue types.
By obfuscating all customer specific data in the DT records, a knowledge base of problems can be developed and made available to the appropriate personnel, to assist in returning a system to an E10 Uptime state.
This presentation will outline the challenges, goals, content and hurdles involved in gathering and acting upon the data that can be collected.