MEMS: Making Micro Machines

By Silicon Run Productions ^©2009

Running Time: 42 minutes

Format: DVD (English)

Click here to see DVD Trailer

MEMS: Making Micro Machines is the first video of a trilogy featuring MEMS and nanotechnology. This colorful and lively video gives us an overview of how Microelectromechanical Systems are made by featuring the design, fabrication, packaging and testing of some of the most common MEMS devices. It presents close-ups of industrial processes and device animation to help students and technicians understand MEMS manufacturing. It is an ideal training tool for industry professionals at all levels and college students.

MEMS includes an inside look at prominent manufacturing facilities. It explores-

• MEMS Applications
• Fabrication of Thermal Inkjet Printheads
• Microfluidics
• Mechanical and Electrical Components
• Surface and Bulk Micromachining
• Sacrificial Layers
• Digital Micromirror Devices
• Packaging and Testing DMD Chips
• Bonding
• Stiction
• Design Process Flow
• Pressure Sensors
• Accelerometers
• Gyroscopes
• Stack Devices with RFID
• Deep Reactive Ion Etch

Funding was provided by a major grant from the national Science Foundation, and partial funding from Robert Bosch GmbH, Freescale Semiconductor and SEMI.

To better appreciate MEMS: Making Micro Machines, we encourage you to explore the Silicon Run Video Series. While MEMS covers the mechanical aspect of MEMS devices, the Silicon Run Video Series covers the electrical aspect, as part of IC fabrication. The series is an exceptional educational video collection that showcases the world of semiconductor and computer manufacturing.