SMC 18 Suvi Haukka BIO

Suvi Haukka, PhD
Executive Scientist, ASM Microchemistry

Dr. Suvi Haukka is currently employed as an Executive Technologist for ALD applications for ASM International, and she is based in Helsinki, Finland where the R&D site of ASM, ASM Microchemistry is located.  For over twenty years she has worked in various capacities, including Research Scientist, Catalyst Technology Manager, Process Development Manager and R&D Manager, which all have been related to atomic layer deposition (ALD). In particular, her work has focused on ALD and applications of it for semiconductor equipment, processes, and devices as well as development of ALD apparatus.  Over the course of her career, she has been an author of over 70 scientific papers, primarily concerning ALD processes, applications and apparatus, and she was awarded the ALD Innovation prize at the ALD 2016 Ireland conference.  In addition, she is an inventor of more than 100 ALD patents and patent applications in the field of semiconductor fabrication.  In 1994 Suvi Haukka earned a Doctor of Philosophy degree from the Laboratory of Analytical Chemistry, University of Helsinki, Finland.