Semiconductor Components, Instruments, and Subsystems (SCIS)

Semiconductor Components, Instruments, and Subsystems Special Interest Group

The Semiconductor Components, Instruments, and Subsystems (SCIS) Special Interest Group represents companies that produce, package and/or distribute any of the following used in semiconductor or related industries:

  • Components such as seals, filters, mass flow controllers, valves, sensors, ion beam sources, etc.

  • Instruments for in-line and off-line data measurement, collection, and monitoring

  • Sub-systems that support process tools e.g. vacuum, robotics, power conversion, abatement, chillers, etc.

Focus: Establishing a baseline for measuring defects introduced by process-critical components

  • Particle or defect limits will not be defined, but will focus on defining consistent methodologies for measuring defects

Featured Articles

 

Featured Events

Feb 8-10, 2017
Mar 14-16, 2017
Apr 25-27, 2017
Jul 11-13, 2017

 

Upcoming Face-to-Face Meeting

Sept 18, 2017
1 PM to 5 PM PST
SEMI Headquarters in Milpitas, CA
Nov 29, 2017 (tentative)
10 AM to 2 PM PST
SEMI Headquarters in Milpitas, CA

 

About SCIS

Interested in becoming a SCIS SIG Member?

Contact Paul Trio for more information at: ptrio@semi.org