SEMI Arizona Breakfast Forum

SEMI Arizona Breakfast Forum

Friday, Mar 9, 2018
07:30 AM
Friday, Mar 09, 2018 at 07:30 AM
Venue: ASU Tempe Campus, Marston Theater (in ISTB4 building)
Interdisciplinary Science & Technology Building IV (ISTB4 ), 781 S. Terrace Rd.
Tempe, Arizona, United States - 85287

Pricing

Last Chance to Register at Early Bird Pricing:  $55 (SEMI MEMBERS), $75 (SEMI NON-MEMBERS), please register before March 6th, 2018 to get Early Bird Pricing. 

Price increases on March 7, 2018 to  $75 (SEMI MEMBERS) and $95 (SEMI NON-MEMBERS).



The SEMI Arizona Chapter presents:

Metrology & Inspection

SEMI Arizona Chapter invites you to Arizona State University to hear our distinguished experts discuss metrology and inspection. You'll hear insights on the science of measuring properties, defects and other characteristics in materials, processes, and products. This includes the science of measurement of boundary layers to process precursors and defects that affect the final product.

 After the breakfast and presentations, attendees are encouraged to participate in a tour of the LeRoy Eyring Center and get a close-up view of the Mars Rover!

SEMI Arizona Breakfast Forum is a great opportunity to network with your colleagues and meet other local industry professionals.

Attendees will be provided FREE PARKING VOUCHERS (Sponsored by ASU).

Parking structure address is:  1098 S Rural Road, Tempe AZ 85287.



Agenda

7:30am
Welcome Breakfast, Registration and Check In
8:00
David Kirsch, VP and General Manager of EV Group, North America
8:10
A COMPACT X-RAY LASER AND IT'S APPLICATIONS

KEYNOTE: John C. H. Spence, PhD
Professor, Department of Physics
Arizona State University

8:40
CHALLENGES AND INNOVATIONS IN DEFECT INSPECTION AND METROLOGY

Mark Shirey
Vice President, Customer Success & Applications
KLA-Tencor

9:05
FLOW METROLOGY INNOVATION WHICH ENABLES NEXT GENERATION SEMICONDUCTOR PROCESSES

Patrick Lowery
Vice President of Advanced Technologies
HORIBA Instruments

9:30
Networking Break
10:00
LASER-BASED INSPECTION TECHNIQUE FOR NON-VISUAL DEFECTS

Reza Asgari
General Manager, Americas
Rudolph Technologies

10:25
PRECESSION ELECTRON DIFFRACTION ENABLED STRAIN, PHASE AND ORIENTATION MAPPING FOR SEMICONDUCTOR DEVICE METROLOGY

Robert Stroud
Sales Director, North & South America
NanoMEGAS

10:50
Tour of the LeRoy Eyring Center for Solid State Science (including the Mars Rover): Approximately 45 min.
11:35
Adjourn

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